四、儀器硬件技術(shù)參數(shù)：
Four, The instrument hardware technical parameters:
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儀器型號 Model
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LVS1000-L
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測量范圍（mm)
Measuring range
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X
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800
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Y
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1000
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|
Z
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150
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工作臺(mm)
Workbench
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工作臺面
Work surface
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1160*960
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玻璃臺面
Glass countertop
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1060*860
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承重
Load-bearing
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50kg
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|
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遠(yuǎn)心鏡頭
Telecentric lens
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140mm
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鏡頭
Lens
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0.7~4.5
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視頻放大倍率
Video magnification
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30－225X
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光柵尺分辨率
Grating scale resolution
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0.1um
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線性精度(μm)
Linear accuracy
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X/Y精度≤2+L/200 ；Z精度<3+L/200
X/Y accuracy ≤2+L/200; Z accuracy <3+L/200
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外形尺寸（mm)
Overall dimension
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1700*1300*1950mm
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儀器重量(kg)
Instrument weight
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2500
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照明
Illumination
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LED表面光及下光源,亮度可調(diào)
LED surface light and lower light source, brightness can be adjusted
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電源
Power source
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220V±10%(AC) 50HZ
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